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Accurate Modeling Method for Cu Interconnect

Kenta YAMADA, Hiroshi KITAHARA, Yoshihiko ASAI, Hideo SAKAMOTO, Norio OKADA, Makoto YASUDA, Noriaki ODA, Michio SAKURAI, Masayuki HIROI, Toshiyuki TAKEWAKI, Sadayuki OHNISHI, Manabu IGUCHI, Hiroyasu MINDA, Mieko SUZUKI

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